article
The paper presents research on the fabrication and electrical characterization of transparent contacts based on ZnO. Contact layers were manufactured in the process of physical vapor deposition (PVD) by the codeposition method, which allowed to obtain thin layers with various compositions and parameters. The evaporation unit NANO36 (Kurt&Lesker) allows real-time control of such parameters as the rate of layer growth, the composition of the obtained structure and its resultant thickness.The tests of the current-voltage characteristics were performed by typical source measure unit KEITHLEY 4200-scs system. Surface analysis was performed using an AFM microscope. The structures can be used in thin-film cells and are an alternative to ITO contacts.
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DOI: 10.1109/icton62926.2024.10647841
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