book chapter · Lecture notes in electrical engineering

Analysis of 2D Simulation of Hydrogenated Silicon Nitride Plasma Discharge in CCP Reactor for Thin Film Solar Cell Deposition

20233 citationsMohamed I University

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Research topics

Plasma Diagnostics and Applications
Electrohydrodynamics and Fluid Dynamics
Diamond and Carbon-based Materials Research

Sustainable Development Goals

7Affordable and Clean Energy

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DOI: 10.1007/978-981-19-6223-3_20

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